Hitachi’s Regulus8230 is an ultra-high resolution cold-field emission SEM that has been enhanced for sensitive materials and nanostructures.
Image the Most Challenging Specimens
- Sophisticated multi-detection system inclusive of energy filtering
- Sub-nanometer resolution available even below 1 kV
- Comprehend internal sample data with angular adjustable HAADF, ADF and BF
- High contrast imaging available at an ultra-low dose with the immersion lens detection system
Image Credit: Hitachi High-Tech Europe
Advanced Nanoanalysis
- Enhanced for windowless or annular EDS detectors, thereby providing excellent light element analysis
- Superfast, high sensitivity EDS can be realized with annular detectors that have a solid angle of >1 sr
Quick Sample Handling
- Quick sample exchange via load lock for samples of up to 200 mm diameter
- Users can easily navigate on their sample or holder to determine the right area of interest using acquired SEM images or color optical image
Image Credit: Hitachi High-Tech Europe
Powerful Automation Tools
- Users can automatically image huge sample areas over multiple fields of view
- Volume microscopy can be done using automated array tomography
- Users can automate repetitive or complex procedures with the help of advanced scripting
- Precise, calibrated, dimension measurements can be performed with CD-SEM algorithms
Future Proof
- Users can load encapsulated oxidation-sensitive specimens (such as Lithium battery components) under inert-gas environments or vacuum
- Hydrated or sensitive samples can be images using Hitachi’s patented Ionic Liquid or a cryo stage
- Users can add CL for acquiring more data from pharmaceuticals, photonics, or minerals