EV Group offers a new automated resist processing system, EVG120, which is specifically designed to process substrates of different shapes and sizes of up to 200 mm. The system offers a number of benefits and ensures high quality standards in a variety of applications at reduced cost of ownership. The EVG 120 has high throughput capability and suitable for high volume production. Moreover, it comes in a compact design for minimal footprint.
Key Features
The main features of the EVG120 resist processing system are:
- Flexible resist processing tool for different process variations
- Flexible combinations of multifunctional modules for developing, spin and spray coating, bake and chill make it suitable for various application fields
- Proprietary Omni Spray ultrasonic atomization technology delivers excellent process results during conformal coating of extreme topographies
- CoverSpinTM technology for optimum spin coating results
- Advanced and field-proven robot handling with dual end-effector capability guarantees continuous high throughput
- Megasonic technology for cleaning, developing and sono-chemical processing enhances process efficiency and reduces process time
- EVG Framework based smart process scheduling capability
- Compact design for minimal footprint
- Excellent process development support and service