The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system
with picometer positioning resolution. Offering maximum versatility, the Nano-HS
can be configured to provide XY or XYZ motion. Internal position sensors utilizing
proprietary PicoQ technology provide absolute, repeatable position measurement
under closed loop control. The compact footprint, ultra-low noise characteristics,
and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications
that require noise floors less than 10 picometers and/or high speed performance.
Features
- High speed, multi-axis
- XY and XYZ configurations
- Z-axis step response time down to 2ms
- Z-axis scans up to 300 Hz
- Closed loop control
- Picometer positioning resolution
Typical Applications
- High speed, high resolution positioning
- Metrology
- AFM
- SPM