Aug 1 2008
Following the introduction of the AFM height calibration standards HS-100MG and the HS-20MG, BudgetSensors announces the commercial introduction of third type of AFM height calibration standard – the HS-500MG.
Just as the height calibration standards HS-100MG and the HS-20MG, the HS-500MG features silicon dioxide structure arrays on a 5x5mm silicon chip. The fabrication process guarantees excellent uniformity of the structures across the chip. This in turn ensures easy and reliable Z-axis calibration of any AFM system.
Arrays of structures with different shape and pitch are integrated on each chip. Aside from Z-axis calibration, this design also allows X- and Y-axis calibration for bigger scanners (40-100µm range).
The HS-500MG features structures with 500nm step height. With the introduction of the HS-500MG BudgetSensors customers can choose between height calibration standards with 3 different step heights: 20nm, 100nm and 500nm.
For more detailed product specifications, please visit www.budgetsensors.com/calibration_standards.html.
More calibration standards by BudgetSensors® are under development.