HORIBA Scientific is pleased to announce the unique Auto SE as the winner of the 2008 IC Industry New System Award.
The AutoSE from Horiba Scientific.
The IC Industry Awards are a recognised platform that allows the semiconductor industry to judge the products and practices serving the industry.
The new Auto SE is the only simple, integrated spectroscopic ellipsometer solution for determining the thicknesses and optical constants of thin layers and multi layers.
This new thin film measurement tool has been designed to fulfil thin film quality control requirements. It provides full automation (loading, alignment, mapping), automated selection of 8 different spot sizes down to 25x60 µm and a unique integrated vision system. It is controlled by the intuitive Auto Soft software that enables push button thin film analysis for routine operation, with advanced engineering and service modes available for characterising new materials.
“We believe that the Auto SE is a major turning point for spectroscopic ellipsometry as it provides accurate thin film quality control very quickly and simply. The unique imaging capability of the MyAutoView vision system shows exactly where the measurement spot is placed, so it is ideal for characterising patterned samples. We are proud to receive this award on behalf of the Thin Film Division as the Auto SE is the result of the continuous efforts of all thin film staff members” said Denis Cattelan, Director of HORIBA Scientific Thin Film Division.