The Zeta-20 Optical Profiler from KLA is an ideal tool for handling difficult surface metrology. The Zeta-20 includes a spectrometer, a true color profiler and an interferometer.
It is highly capable of profiling a variety of surfaces such as poly-urethane, MEMS device for sensing pressure, RGB pixels imaged inside a cell phone, fabric for clean room clothing, micro needles for drug delivery and laser sealed plastic bag for food packaging.
Figure 1. Poly-urethane surface for CMP
Figure 2. MEMS Device for sensing pressure
Figure 3. Fabric for clean room clothing
Key Features
The key features of the Zeta-20 Optical Profiler include:
- User-friendly with automated measurements requiring limited sample preparation
- Versatile measurements that are free of physical properties or geometry
- Rapid data recovery time
- Complementary to other metrology methods
- Minimal cost-of-ownership (COO)
- Production worthy
This information has been sourced, reviewed and adapted from materials provided by KLA Corporation.
For more information on this source, please visit KLA Corporation.