The Hiden HMT quadrupole mass spectrometer is a one-of-a-kind dual-mode RGA device that can operate at pressures as high as 5×10-3 mbar without the use of differential pumping. A carefully constructed ion source/quadrupole filter pair and software that corrects for abundance non-linearity are used to operate at this pressure.
The HMT is suited for process monitoring applications thanks to its unique high-pressure specification.
Applications
- Thin-film optical covering
- ALD/MOCVD/CVD
- Residual gas analysis
- Near atmospheric XPS, APXPS
- Vacuum processing
Overview
The HMT is used for vacuum process analysis and residual gas analysis, and it is important for process operating condition checks as well as in-process analysis for identifying unexpected pollutants. In addition, the HMT system can operate in RGA mode, just like a regular quadrupole RGA.
Partial pressure sensitivity in the 10-13 mbar range is achieved using dual Faraday/electron multiplier detectors. CVD, etching, PECVD and PVD are examples of processes that can be monitored. In short, HMT is a troubleshooting and monitoring RGA tool for processes.
Features
- RGA mode for high sensitivity operation at P < 10-4 mbar (minimum noticeable partial pressure 2 × 10-11 mbar)
- HMT mode for a high-pressure operation to 5×10-3 mbar (minimum noticeable partial pressure 5 × 10-8 mbar)
- 100 amu mass range, Remote (PC) Control interface through MASsoft Professional PC software
- Quick access, mixed-mode scanning Trend and Analog in several windows for example
- Data export capacity to ASCII format and all Windows devices
- Stability (less than ±1% height variation over 24 hours)
- Dynamic Data Exchange facility for real-time data transfer to other DDE client well-suited Windows™ applications, for example, Excel, SPC-IV statistical process control software.
- The cursor for peak height recognition under mouse control
- Real time background subtract, automatic mass scale alignment
- MASsoft software control through RS232, USB or multiple systems through Ethernet LAN
- Instantaneous live time display of graphical and tabular trend analysis data
- Dynamic Data Exchange facility for real-time data transfer to other DDE client well-suited Windows™ applications, for example, Excel, SPC-IV statistical process control software.