Nanodevice Prototyping With Focused Ion Beam SEM With NanoBuilder Software

Thermo Scientific’s NanoBuilder software is a tool for systematically planning and constructing multi-layer nanodevices. This is done by dividing CAD files into ordered projects, which allows for the generation of complex structures that were previously too tedious or even impossible to build. 

NanoBuilder Software enables the precise design of intricate and large-scale nanostructures across various locations, accommodating the entire range of DualBeam (focused ion beam scanning electron microscopy, FIB-SEM) techniques, including FIB etching, gas-assisted FIB etching, FIB-mediated deposition, and electron beam-induced deposition.

Key Features of Nanobuilder Rapid Prototyping Software

Fully Automated

Fully automated job execution, stage navigation, milling, and deposition.

Alignment

Automated alignment and drift control.

FIB and GIS

Focused ion beam (FIB) and gas injection systems (GIS) optimized.

Patterning Sequences

Plan patterning sequences on your desktop PC using Thermo Scientific NanoArchitect Software.

CAD

CAD-based prototyping.

Specifications

Source: Thermo Fisher Scientific – Electron Microscopy Solutions

  GDSTODB NanoBuilder
Import GDSII files
GDSII viewer
Convert to Thermo Scientific stream files  
Automated alignment and drift control  
Automated job execution  
Multi-site support  
Integrated editing of microscope properties  
Alignment without exposing the site of interest  

Other Equipment

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