Hysitron TI 990 TriboIndenter - For Nanomechanical Testing

Bruker's latest iteration of the TI 990 TriboIndenter® boasts cutting-edge measurement modes, enhanced testing speed, and expanded testing capabilities, ideal for comprehensive nanomechanical characterization.

Each aspect of the measurement and analysis procedure integrates state-of-the-art technology, including the advanced Performech® III controller, the latest TriboScan 12 software, next-gen nanoDMA® IV dynamic nanoindentation, and XPM II high-speed mechanical property mapping.

Define What is Possible

TI 990 revolutionizes nanomechanical testing by offering unparalleled customizability. Users can effortlessly mount their samples in the lab, free from the constraints of restrictive stages or environmental disturbances. You can design experiments to run for any desired duration, unconfined by specific feedback modes or data acquisition constraints.

Whether it is enhancing accuracy for polymer thin films, boosting throughput for combinatorial materials science, or conducting multi-measurement analysis on full 300 mm semiconductor wafers, TI 990 seamlessly adapts to any dynamic testing requirements.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

Only TI 990 Delivers:

  • Unmatched Performance for Nanoindentation, Nanoscratch, and Nanowear Testing: Recent developments in Performech control technology, with XPM II ultrahigh-speed mechanical property mapping and nanoDMA IV dynamic nanoindentation.
  • Most Streamlined System Operation with Superior Control Over the Measurement Process: All-new TriboScan 12 operating software with simplified and assisted workflow.
  • Unlimited Potential for Future Developments in Nanoscale Characterization: Modular system architecture, universal sample mounting options, and the world’s largest suite of advanced nanomechanical techniques.

The New Standard for Nanoindentation

Exceptional Performance and Control

Industry-Leading Noise Floors

The TI 990 features exclusive electrostatic actuation technology coupled with ultralow-noise electronics, an active antivibration system, a rigid granite platform, and a custom-engineered environmental enclosure. This combination ensures superior performance across the widest range of laboratory environments.

Performech III Advanced Control Module

The latest Hysitron® control technology, equipped with parallel processing and dual lock-in amplifiers, enables innovative new control modes, ultra-fast feedback control, and unlimited data acquisition and test function definition capabilities. This advanced setup enhances the precision and flexibility of nanomechanical testing processes.

Industry-leading noise floors enable quantitative measurement down to single-nanometer contact depths.

Industry-leading noise floors enable quantitative measurement down to single-nanometer contact depths. Image Credit: Bruker Nano Surfaces and Metrology

Unique Testing and Characterization

nanoDMA IV with CMX

The nanoDMA IV with CMX represents the next generation in dynamic nanomechanical testing. It features displacement feedback control, automated displacement amplitude tuning, force amplitude control, and dual lock-in amplifiers for 2nd-harmonic measurements. This measurement mode provides a comprehensive characterization of mechanical properties as a function of depth, frequency, and time.

XPM II Accelerated Property Mapping

The XPM II offers accelerated property mapping with an industry-leading throughput of 12 measurements per second. It allows dynamic property mapping based on depth and utilizes advanced machine-learning clustering algorithms for rapid and reliable data analysis.

In-Situ SPM Imaging

In-situ SPM imaging enhances the process further with top-down scanning probe microscopy (SPM). This technology improves measurement accuracy and repeatability, delivers a ±10 nm test positioning accuracy, enables the correlation of mechanical properties with sample morphology, and facilitates post-test observation of material deformation.

XPM II high-resolution, ultrahigh-speed property mapping up to 12 measurements/sec.

XPM II high-resolution, ultrahigh-speed property mapping up to 12 measurements/sec. Image Credit: Bruker Nano Surfaces and Metrology

User-Focused Operation and Analysis

TriboScan 12 Control Software

TriboScan 12 offers the newest nanomechanical testing modes and streamlines system operation, from sample setup to results, thanks to its user-friendly design.

Tribo iQ™ Data Analysis Software

Tribo iQ is a suite of technique-specific data analysis, charting, and reporting apps for thorough and adaptable analysis. It is built on a sophisticated scientific software engine.

In-situ SPM imaging enables high-precision test placement to within ±10 nm.

In-situ SPM imaging enables high-precision test placement to within ±10 nm. Image Credit: Bruker Nano Surfaces and Metrology

Powerful Base Configuration

Maximize the Characterization Potential

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

Measure More, Measure Better

Keeping at the Forefront of Materials Innovation

TI 990 can quantitatively measure over six orders of magnitude in force and 11 orders of magnitude in displacement, ensuring it meets the measurement needs of today and the future.

It includes a universal sample chuck with magnetic, mechanical, and vacuum mounting options, accommodating a wide array of sample types and geometries. The testable area is 60 % larger than previous TriboIndenter systems, enabling the analysis of larger surface areas and the testing of more samples in an automated workflow.

An optional dual Z stage design offers independent control over any combination of two measurement heads, facilitating superior multi-technique characterization of samples with large or complex geometries.

TI 990 is designed for high-precision measurements in a broad range of laboratory environments and integrates seamlessly with future advanced techniques:

  • The system can function at its best in a variety of environments, thanks to its vibration-dampening base, which offers a 50× improvement in environmental noise immunity.
  • Its modular environmental enclosure, which has a large internal volume, is incredibly versatile and enables the system to be customized for specific research needs. 

Additionally, TI 990 has unmatched Performech III technology, which combines strong, real-time control and signal processing with up to 16 parallel data collection channels and a simultaneous 1.25 MHz data sampling rate across all channels.

Superior precision and control during the measurement process are ensured by industry-leading noise floors, dual lock-in amplifiers for 2nd-harmonic measurement, an ultrafast force and displacement control feedback loop rate, and unlimited data acquisition and test segment programmability.

Simple Operation and Comprehensive Analysis

With the Tribo iQ analytical application package and the new TriboScan 12 control software, system setup, data collecting, and data analysis have never been simpler. Data can be collected from any operator location by remotely operating the complete system setup and measurement procedure.

During system setup with TriboScan 12, multiple cameras within the environmental enclosure provide operators with real-time viewing of transducer locations and staging. A dedicated sample-chuck camera aids in the precise definition of sample locations. The automated focus of the sample optics enables operators to swiftly navigate to the desired testing region.

After data collection, the Tribo iQ suite, featuring over 15 technique-specific applications, offers unparalleled data analysis, plotting, and reporting capabilities. 

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

No System Has More Modes

The TI 990 comes equipped with a robust set of procedures that allow for thorough nanomechanical characterization of materials.

Nanoindentation

  • The combination of capacitive displacement sensors and proprietary electrostatic actuation produces noise floors that top the industry in terms of precision and reproducibility of measurements.
  • The testing procedure may be more effectively controlled using an ultrafast feedback control loop rate of 78 kHz.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

Nanoscratch

  • High-precision normal and lateral force measurements enable quantitative assessments of thin-film adhesion and friction.
  • Electrostatic actuation in both the normal and lateral directions provides extreme sensitivity for nanoscale interfacial and tribological measurements.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology 

Nanowear

  • Determine the material removal rate quantitatively as a function of the probe speed, wear passes, and applied probe force.
  • Determine the wear volumes on thin films, between surfaces, and for specific phases or materials.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

In-Situ SPM Imaging

  • The system enables superior nanomechanical characterization through high-precision probe placement accuracy (±10 nm), test placement validation, and observation of material deformation behavior.
  • Customizable SPM resolution options range from 64x64 to 4096x4096, accommodating various imaging needs.
  • Dual piezo scanners offer in-situ SPM imaging capabilities with any combination of electrostatic transducers, without requiring hardware modifications.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology 

XPM II

  • Quantitative mechanical property measurements at extremely high speeds (12/second)
  • Spatial mapping of hardness and modulus at high resolution using distribution statistics
  • Comparing standard quasistatic nanoindentation testing to 1000× quicker data collection
  • xSol® environmental control stage compatibility for rapid testing under extreme conditions

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology 

nanoDMA IV with CMX

  • Measurement of viscoelastic and elastic-plastic characteristics quantitatively as a function of time, depth, and frequency.
  • Automated displacement amplitude tuning for 2nd harmonic analysis using dual lock-in amplifiers.
  • When measuring at short depths or on extremely plastic materials, force amplitude control ensures constant surface contact.
  • Exclusive reference-frequency drift correction for long-duration testing

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

Expanding Capabilities

Comprehensive Suite of Upgrade Options Enable the TI 990 to Evolve as Needed

The xSol Environmental Stage facilitates quantitative, accurate, and reliable nanomechanical and nanotribological characterization at temperatures as high as 800 °C. By expanding the xSol, measurements at low temperatures and controlled humidity levels are also achievable.

Incorporated into the xSol's design is a micro-environment that ensures equilibrium between tip and sample temperatures, and supports testing in customizable gaseous atmospheres.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology 

The 3D OmniProbe enhances force and displacement measurement capabilities from the nano- to micro-domain for both indentation and scratch tests. Its ability to handle larger displacements and higher forces enables the micromechanical characterization of thick, hard, or abrasive films.

Comprehensive Nanomechanical Testing with TI 990

Image Credit: Bruker Nano Surfaces and Metrology

Additional Upgrade Options

Source: Bruker Nano Surfaces and Metrology

. .
nanoECR In-situ conductive nanoindentation correlates nanomechanical properties, material deformation behavior, and electrical characteristics of materials
iTF Patented analytical software package that provides quantitative, substrate effect-free elastic properties of thin films
MultiRange NanoProbe Expanded force- and displacement-range transducer providing microscale mechanical testing
Synchronized Raman Spectroscopy Spatial correlation of mechanical and tribological properties with material structure and chemistry
Modulus Mapping Scanning dynamic nanoindentation mode provides quantitative, high-resolution maps of viscoelastic properties across a surface
Fluorescence Microscopy Integrated fluorescence microscope enables fluorochrome-guided test placement
Electrochemical Cell Quantitative, in-situ measurements of nanoscale mechanical and tribological behavior under oxidizing and reducing conditions
Automated Probe Changer Push-button exchange of testing probes provides maximum uptime, ease of use, and probe-customizable automation routines
Sample Chucks Diverse range of magnetic, mechanical, and vacuum chucks secure almost any sample for testing, up to a 300 mm wafer
TriboAE Transducer that provides in-situ, through-tip monitoring of acoustic signals generated from fracture and deformation events during the nanoindentation process
TriboImage Time-resolved cyclic nanoscale scratch/wear characterization
Dual Z Stages Independent approach/withdrawal of any two measurement heads, enabling multi-technique characterization on large substrates

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