The Q-545 is a linear stage, low profile piezo positioning stage that uses a piezo stick slip motor for high precision and load capacity. The cross roller bearing and the big platform are guaranteeing a smooth and high accurate movement in the range of sub nanometer.
U-545 stages can be controlled with our E-873 closed loop piezo controller. The inetgrated linear encoder offers nanometer repeatability. Vacuum compatible and non magnetic versions are available.
Key Features
The key features of the U-545 are:
- Piezo driven stepping motor with subnanometer resolution
- Travel range up to 26 mm (1")
- Encoder resolution 2 nm
- Optional integrated linear scale
- Uni-directional repeatability down to 0.050 µm
- Maximum speed 10 mm/sec
- Load capacity up to 1 kg