Nanofabrication News

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Higher-Quality Coatings Through “Runaway” Self-Sputtering

Higher-Quality Coatings Through “Runaway” Self-Sputtering

UCSC Awarded Prestigious Keck Foundation Grant to Establish W. M. Keck Center for Nanoscale Optofluidics

Tegal Receives Order for DRIE 3200 Multi-Module Cluster Tool from High Volume Manufacturer of MEMS Sensors

Tegal Receives Order for DRIE 3200 Multi-Module Cluster Tool from High Volume Manufacturer of MEMS Sensors

Using Nanotechnology to Develop Intelligent Materials that are Better Accepted by the Human Body

Leading Provider of Stamps for Nanoimprint Lithography Announces New Collaboration

Leading Provider of Stamps for Nanoimprint Lithography Announces New Collaboration

SCI Engineered Materials Enters into $1 Million Business Loan Agreement

SCI Engineered Materials Enters into $1 Million Business Loan Agreement

Air Liquide Electronics Announce Major Capacity Expansion of TORUS Manufacturing at ALOHA TM Facility

Achievement Paves Way for Manufacturing Reliable Electronic Nanocircuits at the Nanoscale

Achievement Paves Way for Manufacturing Reliable Electronic Nanocircuits at the Nanoscale

EV Group Demonstrates Continued MEMS Leadership Around the Globe With Order Win From Samsung Electro-Mechanics

EV Group Demonstrates Continued MEMS Leadership Around the Globe With Order Win From Samsung Electro-Mechanics

Another MEMS PVD Win for Tegal, the Leader in Stress Controlled Metal Film Deposition for MEMS Fabrication

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