Aviza Technology Receives Order from Advanced Logic IC Manufacturer in Japan

Aviza Technology, Inc., a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced that it has received an order for its Celsior fxP single wafer atomic layer deposition (ALD) system from a leading advanced logic integrated circuit (IC) manufacturer in Japan. The Celsior fxP system will be fitted with multiple chambers that will be used for high-k and metal gate (HKMG) deposition.

Aviza's Celsior fxP system was selected over other competing technologies because of its ability to consistently deliver superior device performance on sub-45nm logic devices. In addition, the HKMG stack deposited on the Celsior fxP demonstrated very low leakage currents at reduced effective oxide thickness (EOT) and stable values of effective work function. These parameters are critical for manufacturing of both logic and flash devices at sub-45nm nodes. The process chambers have been designed to demonstrate extendibility to the sub-32nm nodes.

"This Celsior fxP system order signifies Aviza's continued market penetration and adoption of our ALD Logic applications," said Dr. Masaaki Yashiro, President of Aviza Technology Japan K.K. "The system was selected on the key merits of delivering improved device performance via accurate film composition control and process repeatability for HKMG stacks used for advanced Logic ICs. We look forward to supporting our customer's manufacturing and development needs."