MEMS - NEMS - Books

Microbiorobotics: Biologically Inspired Microscale Robotic Systems

Microbiorobotics is a new engineering discipline that inherently involves a multidisciplinary approach (mechanical engineering, cellular biology, mathematical modeling, control systems, synthetic biology, etc).

Micromanufacturing and Nanotechnology

Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts.

Principles and Applications of NanoMEMS Physics

NanoMEMS exploits the convergence between nanotechnology and microelectromechanical systems (MEMS) brought about by advances in the ability to fabricate nanometer-scale electronic and mechanical device structures. In this context, NanoMEMS-based applications will be predicated upon a multitude of physical phenomena, e.g., electrical, optical, mechanical, magnetic, fluidic, quantum effects and mixed domain.

Nanotechnology and Nanoelectronics - Materials, Devices, Measurement Techniques

This book provides a concise and didactically structured presentation of nanotechnology as matters stand. Both students and engineers can gain valuable insights into the historical development, production, and characterization procedures of structures in the nanometer range, their electrical applications, measuring procedures for the determination of nanodefect, nanolayer, and nanoparticle characteristics, and the major techniques of preparation in nanotechnology. Based on known facts, an evaluation of nanotechnology, its further development, and its future prospects are attempted.

Handbook of Silicon Based MEMS Materials & Technologies

Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.

Mems/Nems Handbook

As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists.