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Uppsala University Orders Silicon DRIE Tool from Tegal

Tegal Corporation, an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received an order for a Tegal 110 S/DE DRIE tool from Uppsala University.

From Collabrx, Inc. 19 May 2010

Tyndall Awarded 2 Research Frontiers Programme Projects for Cutting-Edge Research

The Minister for Enterprise, Trade and Innovation, Batt O Keeffe T.D., yesterday (Monday, May 17th 2010) announced 8.5 million for 47 cutting-edge research projects which will create new jobs for the smart economy.

18 May 2010

UCLA Engineers Receive $5.5 Million Grant to Advance MEMS for Defense Applications

If you've ever used an iPhone, a Wii video game or an automobile airbag, you've benefited from micro-electro-mechanical systems (MEMS) technology, in which arrays of tiny devices mounted on computer chips — many no larger than the width of a human hair — are able to sense and respond to changes in heat, light, motion, sound or other external stimuli.

15 May 2010

DALSA to Discuss MEMS Fabrication at METRIC 2010

DALSA Corporation, a world-leading semiconductor and MEMS foundry, will participate in a panel discussion on MEMS fabrication at METRIC 2010 in San Jose, CA, held May 18-19, 2010.

From Teledyne DALSA 15 May 2010

Tango Systems Becomes Member of IME’s MEMS Consortium

Tango Systems, Inc., a leading manufacturer of high-performance PVD systems, has joined the Micro-Electro-Mechanical-Systems (MEMS) Consortium launched by The Institute of Microelectronics (IME), a research institute of the Agency for Science, Technology and Research (A*STAR), on April 8th 2010.

13 May 2010

ADI Develops ADXRS450 Digital iMEMS Gyroscope for New Industrial Applications

New applications for MEMS (micro-electro-mechanical systems) motion sensors are evolving in the industrial automation, medical, and instrumentation markets where much higher performance is required than is typically found in motion sensors designed for consumer applications.

13 May 2010

New Technique Describes Effects of Complex Quantum Forces on Tiny Objects

Discovered in 1948, Casimir forces are complicated quantum forces that affect only objects that are very, very close together.

12 May 2010

Acuity Ships 10 mbar Full-Scale MEMS Pressure Sensor Die

Acuity, Incorporated, a fabless provider of stable high-performance MEMS pressure sensors, is now shipping the AC3050-010 very stable low pressure sensor die with a 10mbar full-scale rating.

12 May 2010

Micro-Electromechanical Systems Accurately Align Optical Components on a Silicon Microchip

All optics research requires precise alignment of optical components to ensure that light passes efficiently from one element to the next. At the micro-scale, however, the process is much more delicate and complicated. N...

11 May 2010

ADI’s Three-Axis Digital iMEMS Accelerometer Honored by EDN Magazine

Analog Devices, Inc., a global leader in high-performance semiconductors for signal processing applications, has received an EDN Magazine 2009 Innovation of the Year Award in the “Analog Front End IC” category for its ADAS1128 current-to-digital converter for CT (computed tomography) scanners.

7 May 2010