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Amtech Systems to Exhibit at Solar Power International Event

Amtech Systems, Inc. (NASDAQ:ASYS), a global supplier of production and automation systems and related supplies for the manufacture of solar cells, today announced that the Company, along with its solar subsidiary, Tempress Systems, Inc., will exhibit (Booth #197) at the 2009 Solar Power International Event taking place October 27-29 at the Anaheim Convention Center in Anaheim, California.

Solar Power International is North America’s largest business-to-business solar industry event, with more than 900 exhibitors that include all solar technologies and more than 25,000 attendees that represent all segments of the solar value chain including manufacturers, integrators, installers, utilities, investors, builders, architects, large energy users and policymakers. More information can be found at www.solarpowerinternational.com.

About Amtech

Amtech Systems, Inc. manufactures capital equipment, including silicon wafer handling automation, thermal processing equipment and related consumables used in fabricating solar cells and semiconductor devices. Semiconductors, or semiconductor chips, are fabricated on silicon wafer substrates, sliced from ingots, and are part of the circuitry, or electronic components, of many products including solar cells, computers, telecommunications devices, automotive products, consumer goods, and industrial automation and control systems. The Company’s wafer handling, thermal processing and consumable products currently address the diffusion, oxidation and deposition steps used in the fabrication of solar cells, semiconductors, MEMS and the polishing of newly sliced silicon wafers.

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