imec Awards Ovivo Contract to Provide Ultrapure Water Plant for New Nanoelectronics R&D Facility

Ovivo Inc. was awarded a contract to provide state of the art Ultrapure Water (UPW) plant for the new clean room facilities of the world-leading semiconductor research institute imec in Leuven, Belgium. The system is scheduled for delivery end 2015.

Imec's new clean room will be 450mm-compatible allowing imec to do its research on the most advanced equipment using the wafer standard required by its semiconductor manufacturing partners.

The fabrication of semiconductor devices requires large volumes of ultrapure water (UPW) and only the purest possible water is acceptable for use in semiconductor manufacturing. To achieve the stringent requirements of the industry, Ovivo offers in-house state-of-the art process design and equipment such as reverse osmosis units, degasification, electrodeionisation and Ultrafiltration.

Ovivo has been actively collaborating with design and construction professionals in developing the roadmap for semiconductor facilities.