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Primaxx Monarch 3 VHF Etch System Installed at SIMIT for MEMS Applications

SPTS Technologies, a provider of sophisticated wafer processing solutions, has installed the Primaxx Monarch 3 vapor hydrogen fluoride (VHF) etch system at the Shanghai Institute of Microsystem and Information Technology (SIMIT) for dry etch release of MEMS structures.

23 Mar 2012

UBM Electronics Releases MEMS Sector Database and Report

UBM Electronics has released a special report titled ‘MEMS Sector Database and Report,’ which discusses the current and future trends of the MEMS market, and includes a database of over 200 major players operating in the market.

22 Mar 2012

NIST Study Paves Way to Develop Nanobatteries for Autonomous MEMS

Scientists at the National Institute of Standards and Technology (NIST), Sandia National Laboratories, College Park and the University of Maryland have developed a sequence of nanowire batteries to show that the electrolyte layer’s thickness can limit the size and performance of the battery.

From National Institute of Standards and Tech (NIST) 22 Mar 2012

Case University Student Receives Keithley Graduate Fellowship Award for Research on Nanoscale Devices

Tina He, a Ph.D. student of the Case Western Reserve University, has received the first annual Keithley Graduate Fellowship Award from Keithley Instruments, a provider of sophisticated electrical test tools and systems, for her research work on advanced nanoscale devices and circuits.

From Tektronix 22 Mar 2012

Advantest to Ship MEMS Relay Samples in April 2012

Advantest has declared that it will start shipping MEMS relay samples in April 2012. These relays are designed for a number of applications such as high-speed communications devices, semiconductor testing equipment, high-frequency wave measurement equipment as well as for the related components.

21 Mar 2012

Ultra Precision Manufacturing Expo Returns to Donald E. Stephens Center in 2013

MICRO.NANO.MEMS 2013, the Ultra Precision Manufacturing Expo returns to the Donald E. Stephens Center, Rosemont, IL on the 13-14 March 2013. Rebranded to better reflect the breadth of ultra precision manufacturing proces...

20 Mar 2012

MEMS Conference Track at Sensors in Design 2012

MEMS Industry Group, the trade association developing MEMS across worldwide markets, will conduct a two-day conference program on MEMS in vertical markets at ‘Sensors in Design 2012’, a four-track event at DESIGN West.

20 Mar 2012

Suss Microtec Launch Manual Resist Coat and Develop Platform for Substrates

SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor and related markets, launched the RCD8, a new manual Resist Coat and Develop Platform for substrates. The new platform offers ...

From SUSS MicroTec AG 19 Mar 2012

Report Discusses Growth Opportunities in Global MEMS Market

Research and Markets has included a new market research report titled ‘Global Micro-electromechanical System Market 2011-2014’ to its database.

From Research and Markets 17 Mar 2012

AMEC Launches Etch Tool for Wafer-Level Packaging, MEMS and 3DIC Applications

Advanced Micro-Fabrication Equipment (AMEC), a provider of advanced micro-fabrication equipment for manufacturing semiconductors, has introduced the Primo TSV200E etch tool designed for 3DIC, MEMS and 200 mm wafer-level packaging applications. It can be used for building devices such as LEDs and CMOS image sensors.

16 Mar 2012