Validating Semiconductor Samples Using the FEI Phenom Electron Microscope

Reductions in production yields for semiconductor manufactures can be costly. Finding the defects to rectify the process and improve yields is a time consuming and expensive business, where samples must be repeatedly processed by mechanical or chemical means and then examined each time to see if the defect is in the examination area. Examinations were carried out using optical microscopes, but as these defects got smaller and smaller high resolution instruments were required. The FEI Phenom personal electron microscope now offers the optimal alternative, with rapid sample analysis, small size and reasonable price. Thus validation of semicondutor samples has become faster and more accurate.

Run time - 2:42min