Fundamental Principles of Optical Lithography, the Science of Microfabrication

Research and Markets has announced the addition of Fundamental Principles of Optical Lithography: The Science of Microfabrication to their offering.

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, i.e., the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This text comprises of ten detailed chapters plus three appendices which also provide problems at the end of each chapter.